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Title Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments Author Zehetner J. Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Dohnal F. Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Držík Milan Kromka A. Source document Proceedings of ADEPT 2022 : 10th International Conference on Advances in Electronic and Photonic Technologies, Tatranská Lomnica, High Tatras, Slovakia. P. 7-12. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč Jaroslav Jr. Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2022 File name Access Size Downloaded Type License Recent challenges in micromachining of wide-bandgap materials and fabrication of MEMS for harsh environments.pdf available 659.7 KB 3 Publisher's version 
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Title Optimization of mask material for deep reactive ion etching of GaAs structures Author Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Co-authors Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Haščík Štefan 1956 SAVELEK - Elektrotechnický ústav SAV Zehetner J. Vojs M. Zaťko Bohumír 1973 SAVELEK - Elektrotechnický ústav SAV Action VEGA 2/0084/20. vedúci projektu Zaťko, Bohumír : 2020-2023 APVV 18-0273. vedúci projektu Zaťko, Bohumír : 2019-2023 APVV 18-0243. vedúci projektu Zaťko, Bohumír : 2019-2022 Source document Proceedings of ADEPT 2021 : 10th International Conference on Advances in Electronic and Photonic Technologies, Tatranská Lomnica, High Tatras, Slovakia. P. 169-172. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč Jaroslav Jr. Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2022 File name Access Size Downloaded Type License Optimization of mask material for deep reactive ion etching of GaAs structures.pdf available 511.6 KB 2 Publisher's version article
Title Growth of carbon allotropes in plasma CVD system Author Kromka A. Co-authors Babchenko Oleg 1983 Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Varga Marian SAVELEK - Elektrotechnický ústav SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Zehetner J. Potocký Štěpán Action MoRePro 19MRP0010. vedúci projetu: M. Varga : 2020-2024 Source document Proceedings of ADEPT 2021 : 10th International Conference on Advances in Electronic and Photonic Technologies, Tatranská Lomnica, High Tatras, Slovakia. P. 17-20. - Žilina : University of Zilina in EDIS-Publishing Centre of UZ, 2022 / Feiler M. ; Ziman M. ; Kováčová S. ; Kováč Jaroslav Jr. Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2022 File name Access Size Downloaded Type License Growth of carbon allotropes in plasma CVD system.pdf available 668.6 KB 2 Publisher's version article
Title Diamond cantilevers for MEMS sensor applications fabricated by laser abiation and optimized etching techniques Author Zehetner J. Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Kováčová Eva 1966 SAVELEK - Elektrotechnický ústav SAV Držík Milan Dohnal F. Kromka A. Source document ASDAM 2022 : Conference Proceedings. P. 195-198. - : IEEE, 2022 / Marek Juraj ; Donoval D. ; Vavrinský E. ; International Conference on Advanced Semiconductor Devices and Microsystems Category AFD - Published papers from domestic scientific conferences Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok z podujatia Year 2022 article
Title Uncooled antenna-coupled microbolometer for detection of terahertz radiation Author Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Co-authors Lobotka Peter 1950 SAVELEK - Elektrotechnický ústav SAV Steiger A. Chromik Štefan 1949 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Raida Z. Pítra K. Zehetner J. Španková Marianna 1969 SAVELEK - Elektrotechnický ústav SAV Gaži Štefan 1948 SAVELEK - Elektrotechnický ústav SAV Sojková Michaela 1980 SAVELEK - Elektrotechnický ústav SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Source document Journal of Infrared, Millimeter, and Terahertz Waves. Vol. 42 (2021), p. 462-478 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2021 DOI 10.1007/s10762-021-00781-y File name Access Size Downloaded Type License Uncooled Antenna-Coupled Microbolometer.pdf Neprístupný/archív 4.9 MB 1 Publisher's version article
Title Front-side diamond deposition on the GaN membranes Author Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Držík Milan Kasemann S. Zehetner J. Vojs M. Zaťko Bohumír 1973 SAVELEK - Elektrotechnický ústav SAV Potocký Štěpán Kromka A. Source document ASDAM 2020 : 13th International Conference on Advanced Semiconductor Devices and Microsystems. P. 42-45. - : IEEE, 2020 / Izsák Tibor ; Vanko Gabriel 1981 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 DOI 10.1109/ASDAM50306.2020.9393833 File name Access Size Downloaded Type License Front-side diamond deposition on the GaN membranes.pdf Neprístupný/archív 718.5 KB 1 Publisher's version article
Title Direct deposition of CVD diamond layers on the top of GaN membranes Author Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Co-authors Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Držík Milan Kasemann S. Zehetner J. Vojs M. Zaťko Bohumír 1973 SAVELEK - Elektrotechnický ústav SAV Potocký Štěpán Kromka A. Source document Proceedings. Vol. 56, 1 (2020), no. 35 Category AFC - Published papers from foreign scientific conferences Year 2020 File name Access Size Downloaded Type License Direct Deposition of CVD Diamond Layers on Top of GaN Membranes.pdf available 383.8 KB 0 Publisher's version article
Title Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications Author Zehetner J. Co-authors Kromka A. Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Gajdošová L. Kasemann S. Source document Proceedings. Vol. 56, Iss. 1 (2020), p. 13. Category AFC - Published papers from foreign scientific conferences Year 2020 URL URL link File name Access Size Downloaded Type License Fabrication of diamond membranes by femtosecond laser ablation for MEMS sensor applications.pdf available 489.6 KB 2 Publisher's version article
Title High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN/GaN heterostructure Author Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Co-authors Dzuba Jaroslav 1987 Držík Milan Kutiš V. Kasemann S. Zehetner J. Source document . P. 33-36 Proceedings of the International Conference on Advances in Electronic and Photonic Technologies : ADEPT 2020. - Slovakia : University of Zilina in EDIS-Publishing Centre of UZ, 2020 / Kováč, jr. J. ; Chymo F. ; Feiler M. ; Jandura D. ; International Conference on Advances in Electronic and Photonic Technologies (ADPET 2020) Category AFD - Published papers from domestic scientific conferences Year 2020 File name Access Size Downloaded Type License High temperature operation of the MEMS piezoelectric pressure sensor based on AlGaN.pdf available 817.7 KB 0 Publisher's version article
Title Optimization of diamond growth on structured, soft and brittle substrates Author Babchenko Oleg 1983 Co-authors Izsák Tibor SAVELEK - Elektrotechnický ústav SAV Varga Marian SAVELEK - Elektrotechnický ústav SAV Aubrechtová Dragounová K. Potocký Štěpán Stehlík S. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV Gajdošová L. Kasemann S. Zehetner J. Kromka A. Source document ASDAM 2020 : 13th International Conference on Advanced Semiconductor Devices and Microsystems. P. 46-50. - : IEEE, 2020 / Izsák Tibor ; Vanko Gabriel 1981 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2020 DOI 10.1109/ASDAM50306.2020.9393868 File name Access Size Downloaded Type License Optimization of diamond growth on structured, soft and brittle substrates.pdf Neprístupný/archív 1 MB 1 Publisher's version article