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Your query: Author Sysno = "^sav_un_auth 0158986^"
  1. TitleParallel proximal probe arrays with vertical interconnections
    Author Sarov Y.
    Co-authors Frank A.
    Ivanov Tzv.
    Zöllner J.-P.
    Ivanova K.
    Volland B.
    Rangelow I.W.
    Brogan A.
    Wilson R.
    Zawierucha P.
    Zielony M.
    Gotszalk T.
    Nikolov N.
    Zier M.
    Schmidt B
    Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV
    Source document Journal of Vacuum Science and Technology B. Vol. 27, no. 6 (2009), p. 3132-3138, Microelectronics and Nanometer Structures
    CategoryADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted)
    Category of document (from 2022)V3 - Vedecký výstup publikačnej činnosti z časopisu
    Type of documentčlánok
    Year2010
    DOI 10.1116/1.3256662
    article

    article



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