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Title Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask Author Dreeskornfeld L. Co-authors Haindl G. Kleineberg U. Heinzmann U. Shi F. Volland B. Rangelow I.W. Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV Luby Štefan 1941 SAVFYZIK - Fyzikálny ústav SAV Kostič Ivan SAVINFO - Ústav informatiky SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Hrkút Pavol 1948- SAVINFO - Ústav informatiky SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Hsin-Yi Lee Source document Thin Solid Films. Vol. 458 ( 2004 ), p. 227-232 Category ADC Year 2004 DOI 10.1016/j.tsf.2003.09.070 
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Title 35uM thick high-resolution silicon stencil mask: Fabrication and operation in high energy ion projection and 10xdemagnification ion projection lithography Author Rangelow I.W. Co-authors Sossna E. Volland B. Shi F. Meijer J. Stephan A. Weidenmuller U. Bukow H.H. Rolfs C. Ngo Vinh Van Leung K.N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Action The 45th International Conference on Electron, Ion and Photo Beam Technology and Nanofabrication. EIPBN 2001 ( 45th : May 29-June 1, 2001 : Washington, DC ) Source document The 45th International Conference on Electron, Ion and Photo Beam Technology and Nanofabrication : EIPBN 2001. Abstracts. P. 96-97. - Washington, DC, USA, 2001 Category AFG - Abstracts of papers from foreign conferences Year 2001 article
Title Progress on nanostructuring with NANOJET Author Voigt J. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Edinger K. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3525-3529 Category ADC Year 2000 DOI 10.1116/1.1319823 article
Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Volland B. Barth W. Voigt J. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 896-899 Category ADC Year 2000 DOI 10.1116/1.591293 article
Title Field emission cathode array with self aligned gate electrode fabricated by silicon micromachining Author Barth W. Co-authors Debski T. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Biehl S. Iwert P. Grabiec P.B. Studzinska K. Mitura S. Bekh I. Lushkin A. Il`chenko L. Il`chenko V. Haindl G. Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3544-3548 Category ADC Year 2000 DOI 10.1116/1.1324648 article
Title Fabrication of open stencil masks with asymmetric void ratio for the ion projection lithography space charge experiment Author Volland B. Co-authors Shi F. Heerlein H. Rangelow I.W. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Cekan E. Vonach H. Loeschner Hans Horner C. Stengl G. Buschbeck H. Zeininger M. Bleeker A. Benschop J. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3202-3206 Category ADC Year 2000 DOI 10.1116/1.1319688 article
Title Dry etching with gas chopping without rippled sidewalls Author Volland B. Co-authors Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Heerlein H. Rangelow I.W. Source document Journal of Vacuum Science and Technology B. Vol. 17, no. 6 (1999), p. 2768-2771 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Year 1999 article
Title Experimental results of the stochastic coulomb interaction in ion projection lithography. Author Jager W.H. Co-authors Derksen G. Mertens B. Cekan E. Lammer G. Vonach H. Buschbeck H. Zeininger M. Horner C. Loeschner Hans Stengl G. Bleeker A. Benschop J. Shi F. Volland B. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Heerlein H. Rangelow I.W. Kaesmaier R. Source document Journal of Vacuum Science Technology B. Vol. 17, no. 6 (1999), p. 3099-3106 Category ADC Year 1999 article
Title Fabrication of piezoresistive sensed AFM cantilever probe with integrated tip. Author Rangelow I.W. Co-authors Grabiec P.B. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Training in Microsystems - Manufacturing Processes for Micromechanical Components. P. XIV-9-XIV-20. - FSRM, Switzerland : Swiss Foundation for Research in Microtechnology, 1999 Category ABC - Chapters in scientific monographs published abroad Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document kapitola Year 1999 article
Title Chemically amplified deep UV resist for micromachining using electron beam lithography and dry etching Author Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Co-authors Rangelow I.W. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Stangl Guenther Grabiec P.B. Rangelow E.W. Belov Miroslav Shi F. Source document Sensors and Materials. Vol. 10, no. 4 (1998) p. 219-227 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 1998 article