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Title Parallel proximal probe arrays with vertical interconnections Author Sarov Y. Co-authors Frank A. Ivanov Tzv. Zöllner J.-P. Ivanova K. Volland B. Rangelow I.W. Brogan A. Wilson R. Zawierucha P. Zielony M. Gotszalk T. Nikolov N. Zier M. Schmidt B Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document Journal of Vacuum Science and Technology B. Vol. 27, no. 6 (2009), p. 3132-3138, Microelectronics and Nanometer Structures Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2010 DOI 10.1116/1.3256662 
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Title Scanning proximal probes for parallel imaging and lithography Author Ivanova K. Co-authors Sarov Y. Ivanov T.Z. Frank A. Zöllner J. Bitterlich Ch. Wenzel U. Volland B. Klett S. Rangelow I.W. Zawierucha P. Zielony M. Gotszalk T. Dontzov D. Schott W. Nikolov N. Zier M. Schmidt B. Engl W. Sulzbach T. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Issue data American Vacuum Society Source document Journal of Vacuum Science Technology B. Vol. 26, No. 6 (2008) P. 2367-2373 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2008 DOI 10.1116/1.2990789 article
Title Duo-action electro thermal micro gripper Author Volland B. Co-authors Ivanova K. Ivanov T.Z. Sarov Y. Guliyev E. Persaud A. Zollner J.-P. Klett S. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Rangelow I.W. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, P. 1329-1332 (2007) Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 DOI 10.1016/j.mee.2007.01.177 article
Title Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications Author Rangelow I.W. Co-authors Ivanov T.Z. Ivanova K. Volland B. Grabiec P. Sarov Y. Persaud A. Gotszalk T. Zawierucha P. Zielony M. Dontzov D. Schmidt B Zier M. Nikolov N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Engl W. Sulzbach T. Mielczarski J. Kolb S. du Latimier P. Pedreau R. Djakov V. Huq S.E. Edinger K. Fortagne O. Almansa A. Blom H.O. Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 84, iss. 5-8 (2007) p. 1260-1264 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2007 DOI 10.1016/j.mee.2007.01.219 article
Title Thermally driven microgripper as a tool for micro assembly Author Ivanova Katerina Co-authors Ivanov Tzevan Badar Ali Volland B. Rangelow Ivo W. Andrijasevic Daniela Sumecz Franz Fischer Stephanie Spitzbart Manfred Brenner Werner Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Source document Microelectronic Engineering : An International Journal of Semiconductor Manufacturing Technology. Vol. 83 (2006) iss. 4-9, p.1393-1395. - Amsterdam : Elsevier Science Publishers Category ADC Year 2006 DOI 10.1016/j.mee.2006.01.072 article
Title Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask Author Dreeskornfeld L. Co-authors Haindl G. Kleineberg U. Heinzmann U. Shi F. Volland B. Rangelow I.W. Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV Luby Štefan 1941 SAVFYZIK - Fyzikálny ústav SAV Kostič Ivan SAVINFO - Ústav informatiky SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Hrkút Pavol 1948- SAVINFO - Ústav informatiky SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Hsin-Yi Lee Source document Thin Solid Films. Vol. 458 ( 2004 ), p. 227-232 Category ADC Year 2004 DOI 10.1016/j.tsf.2003.09.070 article
Title Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission Author Barth W. Co-authors Debski T. Abedinov N. Ivanov T.Z. Heerlein H. Volland B. Gotszalk T. Rangelow I.W. Torkar K. Fritzenwallner K. Grabiec P. Studzinska K. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Source document Microelectronic Engineering. Vol. 57-58 (2001), p. 825-831 Category ADC Year 2001 article
Title The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS Author Volland B. Co-authors Heerlein H. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Rangelow I.W. Source document Microelectronic Engineering. Vol. 57-58 (2001), p. 641-650 Category ADC Year 2001 article
Title 35uM thick high-resolution silicon stencil mask: Fabrication and operation in high energy ion projection and 10xdemagnification ion projection lithography Author Rangelow I.W. Co-authors Sossna E. Volland B. Shi F. Meijer J. Stephan A. Weidenmuller U. Bukow H.H. Rolfs C. Ngo Vinh Van Leung K.N. Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Matay Ladislav 1950- SAVINFO - Ústav informatiky SAV Action The 45th International Conference on Electron, Ion and Photo Beam Technology and Nanofabrication. EIPBN 2001 ( 45th : May 29-June 1, 2001 : Washington, DC ) Source document The 45th International Conference on Electron, Ion and Photo Beam Technology and Nanofabrication : EIPBN 2001. Abstracts. P. 96-97. - Washington, DC, USA, 2001 Category AFG - Abstracts of papers from foreign conferences Year 2001 article
Title Fabrication of open stencil masks with asymmetric void ratio for the ion projection lithography space charge experiment Author Volland B. Co-authors Shi F. Heerlein H. Rangelow I.W. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Cekan E. Vonach H. Loeschner Hans Horner C. Stengl G. Buschbeck H. Zeininger M. Bleeker A. Benschop J. Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 3202-3206 Category ADC Year 2000 DOI 10.1116/1.1319688 article