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Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Volland B. Barth W. Voigt J. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document Journal of Vacuum Science and Technology B. Vol. 18, no. 6 (2000), p. 896-899 Category ADC Year 2000 DOI 10.1116/1.591293 Title Fabrication and Properties of Micromechanical Calorimeter with Piezoresistive Deflection Sensor and Resistive Microheater Author Gotszalk T. Co-authors Grabiec P.B. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Shi F. Janus P. Barth W. Debski T. Zaborowski M. Rangelow I.W. Action MNE'99. Micro and Nano Engineering International Conference : September 21-23, 1999 : Roma, Italy Source document MNE'99 : Proceedings. - Roma, Italy, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999 Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Barth W. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Volland B. Voigt D. (Dieter) Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document 12th International Vacuum Microelectronics Conference : Proceedings. - Darmstadt, Germany, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999