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  1. 1.Silicon capacitive pressure sensor with linear frequency output

    TitleSilicon capacitive pressure sensor with linear frequency output
    Author Chudý V.
    Co-authors Hrubčín Ladislav 1951
    Sčasný M.
    Kostka J.
    Corporation 12.IMEKO World Congress : 91.09.05-91.09.10
    Issue dataBeijing , 1991. - s. 71-72
    Year1991
    article

    article



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