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Title Properties of Ru/HfxSi1-xOy/Si metal oxide semiconductor gate stack structures grown by atomic vapor deposition Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Co-authors Lupták Roman SAVELEK - Elektrotechnický ústav SAV Hušeková Kristína 1957 SAVELEK - Elektrotechnický ústav SAV Čičo Karol SAVELEK - Elektrotechnický ústav SAV Ťapajna Milan 1977 SAVELEK - Elektrotechnický ústav SAV Weber U. Baumann P.K. Lindner J. Espinos J.P. Source document Journal of the Electrochemical Society. Vol. 153, (2006), p. F176-F179. - Penington Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2006 Title Fixed oxide charge in Ru-based chemical vapour deposited high-? gate stacks Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Co-authors Lupták Roman SAVELEK - Elektrotechnický ústav SAV Ťapajna Milan 1977 SAVELEK - Elektrotechnický ústav SAV Hušeková Kristína 1957 SAVELEK - Elektrotechnický ústav SAV Weber U. Baumann P.K. Lindner J. Source document / Gusev E.P. Defects in high-K gate dielectric stacks. P. 277-286 : nano-electronic semiconductor devices : proceedings of the NATO Advanced Research Workshop on defects in Advanced High-K Dielectric Nano-electronicc Semiconductor Devices, St. Petetburg, Russia, July 11-14, 2005. - Dordrecht : Springer, 2006 Category AEC - Scientific papers in foreign peer-reviewed proceedings, monographs Category of document (from 2022) V2 - Vedecký výstup publikačnej činnosti ako časť editovanej knihy alebo zborníka Type of document príspevok Year 2006 Title 2D and 3D growth of Ru/RuO2 metal layers with atomic vapour deposition Author Manke C. Co-authors Boissiere O. Weber U. Barbar G. Baumann P.K. Lindner J. Ťapajna Milan 1977 SAVELEK - Elektrotechnický ústav SAV Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Source document Microelectronic Engineering. Vol. 83, (2006), p. 2277. - Amsterdam : Elsevier Science Publishers Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2006 Title Low-temperature growth of RuO2 films for conductive electrode applications Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Co-authors Cambel Vladimír 1956 SAVELEK - Elektrotechnický ústav SAV Machajdík Daniel SAVELEK - Elektrotechnický ústav SAV Baumann P.K. Lindner J. Schumacher M. Juergensen H. Source document . Vol. . 5 (2003), p. 173-177 Materials science in semiconductor processing Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2003 Title Platinum, ruthenium and ruthenium dioxide electrodes deposited by metal organic chemical vapour deposition for oxide applications Author Baumann P.K. Co-authors Doppelt P. Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Gueroudji L. Cambel Vladimír 1956 SAVELEK - Elektrotechnický ústav SAV Machajdík Daniel SAVELEK - Elektrotechnický ústav SAV Schumacher M. Lindner J. Schienle F. Burgess D. Strauch G. Juergensen H. Guillon H. Jimenez C. Source document Integrated Ferroelectrics. Vol. 44 (2002), p. 135-139 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2002 Title Growth of Ru and RuO2 films by metal-organic chemical vapour deposition Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Co-authors Machajdík Daniel SAVELEK - Elektrotechnický ústav SAV Cambel Vladimír 1956 SAVELEK - Elektrotechnický ústav SAV Fedor Ján 1976 SAVELEK - Elektrotechnický ústav SAV Pisch A. Lindner J. Source document Journal de Physique IV. Vol. 11, Pr3 (2001), p. 325-332 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2001 Title Substrate dependent growth of highly conductive RuO2 films Author Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Co-authors Machajdík Daniel SAVELEK - Elektrotechnický ústav SAV Cambel Vladimír 1956 SAVELEK - Elektrotechnický ústav SAV Lupták Roman SAVELEK - Elektrotechnický ústav SAV Pignard S. Weiss F. Baumann P. Lindner J. Source document Journal de Physique IV. Vol. 11, Pr11 (2001), p. 77-81 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2002 Title Modeling the diffraction profiles of CVD-grown perovskite oxide superlattices Author Dooryhee E. Co-authors Hodeau J.L. Nemoz M. Rodriguez J.A. Dubourdieu C. Pantou R. Rosina Milan Weiss F. Senateur J.P. Audier M. Roussel H. Lindner J. Source document Journal de Physique IV. Vol. 11, Pr11 (2001), p. 267-272 Category ADC Year 2001 Title Injection MOCVD : ferroelectric thin films and functional oxide superlattices Author Weiss F. Co-authors Lindner J. Senateur J.P. Dubordieu C. Galindo V. Audier M. Abrutis A. Rosina Milan SAVELEK - Elektrotechnický ústav SAV Fröhlich Karol 1954 SAVELEK - Elektrotechnický ústav SAV Haessler W. Oswald Steffen IFS Drážďany Figueras A. Santiso J. Source document . Vol. 133-134, (2000), p. 191-197 Surface and coatings technology Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2000