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Title Experimental and theoretical study on chemically semi-amplified resist AR-P 6200 Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Andok Robert 1973- SAVINFO - Ústav informatiky SAV Barák Vladislav 1948- SAVINFO - Ústav informatiky SAV Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Tanaka Takeshi Corporation VEIT 2017. 20th International Summer School on Vacuum, Electron and Ion Technologies : Black Sea Resort Sozopol, Bulgaria : September 25-29, 2017 Source document Journal of Physics: Conference Series. Vol. 992 (2018), art. no. 012057 Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2018 DOI 10.1088/1742-6596/992/1/012057 URL URL link File name Access Size Downloaded Type License Experimental and theoretical study on chemically semi-amplified resist AR-P 6200.pdf available 1.2 MB 0 Publisher's version 
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