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Title Field emission arrays by silicon micromachining Author Debski T. Co-authors Barth W. Shi F. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV Volland B. Voigt D. (Dieter) Rangelow I.W. Grabiec P.B. Zaborowski M. Mitura S. Action 12th International Vacuum Microelectronics Conference : July 1999 : Darmstadt, Germany Source document 12th International Vacuum Microelectronics Conference : Proceedings. - Darmstadt, Germany, 1999 Category AFC - Published papers from foreign scientific conferences Year 1999