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Title Optimization of e-beam nanostructure patterning for TiO2 gas sensors fabrication Author Ďurina P. Co-authors Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Vutova Katia Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Koleva Elena Mladenov Georgy Kúš P. Pleceník A. Source document / Dimitrova M. ; Ghelev Ch. Eighteenth International Summer School on Vacuum, Electron and Ion Technologies : VEIT 2013. P. 90. - Sofia : Institute of Electronics Bulgarian Academy of Sciences, 2013 ; International Summer School on Vacuum, Electron and Ion Technologies VEIT 2013 Category AFE - Abstracts of invited papers from foreign conferences Year 2013 
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