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Title Cross-ionization of the sputtered flux during hybrid high power impulse/direct-current magnetron co-sputtering Author Šroba Viktor Co-authors Viskupová Katarína Wicher Bartosz Rogoz Vladyslav Li Xiao Mikula Marian SAVMAMES - Ústav materiálov a mechaniky strojov SAV Greczynski Grzegorz Source document Journal of Vacuum Science and Technology A. Vol. 42, iss. 2 (2024), art. no. 023410 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2024 DOI 10.1116/6.0003258 
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