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Title Electron beam energy deposition and resist profile modeling during electron beam lithography process Author Cvetkov Kristian Co-authors Gerasimov Vladislav Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Koleva Elena Vutova Katia Asparuhova Boriana Action International scientific conference High technologies. business. society. HTBS 2018 : 12.-15.3.2018 : Borovets, Bulgaria Source document International scientific conference High technologies. business. Society : Proceedings, Volume I "High technologies". Vol. II, no. 1 (2018), p. 124-127. - Sofia, Bulgaria : Scientific Technical Union of Mechanical Engineering Industry 4.0 Category AFC - Published papers from foreign scientific conferences Year 2018 
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