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Title Limitations of variable shaped electron beam lithography for advanced research and semiconductor applications Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Andok Robert 1973- SAVINFO - Ústav informatiky SAV Action International spring seminar on electronics technology. ISSE 2017 ( 40 : May 10-14, 2017 : Sofia, Bulgaria ) Source document Proceedings of the International Spring Seminar on Electronics Technology. (2017), art. no. 8000969. - : IEEE Computer Society Category ADMB - Scientific papers in foreign non-impacted journals registered in Web of Sciences or Scopus Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2017 DOI 10.1109/ISSE.2017.8000969 
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