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Title Study of electron beam resists: negative tone HSQ and positive tone SML300 Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Ritomský Adrian 1956- SAVINFO - Ústav informatiky SAV Koleva Elena Vutova Katia Mladenov Georgy Action International Conference on Electron Beam Technologies ( 11th : June 8-12, 2014 : Varna ) Source document Elektrotechnika i elektronika E+E : Eleventh International Conference on Electron Beam Technologies. Vol. 49 (2014) no. 5-6 Category ADEB - Scientific papers in other foreign journals not registered in Current Contents Connect without IF (non-impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2014 
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