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Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron
Názov Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron Autor 1954- Jergel Matej SAVFYZIK - Fyzikálny ústav SAV SCOPUS RID ORCID Spoluautori Mikulik P. Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV ORCID Senderák Rudolf 1953 SAVFYZIK - Fyzikálny ústav SAV Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV ORCID Brunel M. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Konečníková Anna 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID Zdroj.dok. Journal of Physics D. Vol. 32, no. 10A (1999), p. A220-A223 Jazyk dok. eng - angličtina Krajina US - Spojené štáty Druh dok. rozpis článkov z periodík (rbx) Ohlasy TANNER, BK - HASE, TPA - CLARKE, J - PAPE, I - LI-BASSI, A - FULTHORPE, BD. High resolution X-ray scattering from nanotechnology materials. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2001, vol. 182, no. 3-4, pp. 202-208. ANDRE, JM - BENBALAGH, R - BARCHEWITZ, R - RAVET, MF - RAYNAL, A - DELMOTTE, F - BRIDOU, F - JULIE, G - BOSSEBOEUF, A - LAVAL, R - SOULLIE, G - REMOND, C - FIALIN, M. X-ray multilayer monochromator with enhanced performance. In APPLIED OPTICS. ISSN 1559-128X, 2002, vol. 41, no. 1, pp. 239-244. SPEZZANI, C - FABRIZIOLI, M - CANDELORO, P - DI FABRIZIO, E - PANACCIONE, G - SACCHI, M. Magnetic order in a submicron patterned permalloy film studied by resonant x-ray scattering. In PHYSICAL REVIEW B. ISSN 1098-0121, 2004, vol. 69, no. 22, pp. PIETSCH, U. - HOLY, V. - BAUMBACH, T. High-resolution X-ray scattering: from thin films to lateral nanostructures. Springer Science & Business Media. 2004, 408 p. ISBN 0-387-40092-3. EASTWOOD, D. S. - HASE, T. P. A. - VAN KAMPEN, M. - BRUCAS, R. - HJORVARSSON, B. - ATKINSON, D. - TANNER, B. K. X-ray scattering from two-dimensionally patterned magnetic thin film nanoscale arrays. In SUPERLATTICES AND MICROSTRUCTURES. ISSN 0749-6036, 2007, vol. 41, no. 2-3, pp. 163-167. YAN, Minhao - GIBAUD, Alain. On the intersection of grating truncation rods with the Ewald sphere studied by grazing-incidence small-angle X-ray scattering. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2007, vol. 40, no., pp. 1050-1055. MEIER, Robert - CHIANG, Hsin-Yin - RUDERER, Matthias A. - GUO, Shuai - KOERSTGENS, Volker - PERLICH, Jan - MUELLER-BUSCHBAUM, Peter. In situ film characterization of thermally treated microstructured conducting polymer films. In JOURNAL OF POLYMER SCIENCE PART B-POLYMER PHYSICS. ISSN 0887-6266, 2012, vol. 50, no. 9, pp. 631-641. WERNECKE, Jan - SCHOLZE, Frank - KRUMREY, Michael. Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering. In REVIEW OF SCIENTIFIC INSTRUMENTS. ISSN 0034-6748, 2012, vol. 83, no. 10, pp. WERNECKE, J. - KRUMREY, M. - HOELL, A. - KLINE, R.J. - LIU, H.K. - WU, W.L. Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN: 0021-8898, DEC 2014, vol. 47, part 6, p. 1912-1920. LOUNIS, Lounes - SPEZZANI, Carlo - DELAUNAY, Renaud - FORTUNA, Franck - OBSTBAUM, Martin - GUENTHER, Stefan - BACK, Christian H. - POPESCU, Horia - VIDAL, Franck - SACCHI, Maurizio. Temperature and field dependent magnetization in a sub-mu m patterned Co/FeRh film studied by resonant x-ray scattering. In JOURNAL OF PHYSICS D-APPLIED PHYSICS. ISSN 0022-3727, 2016, vol. 49, no. 20, pp. PASHAEV, E. M. - VASILIEV, A. L. - SUBBOTIN, I. A. - PRUTSKOV, G. - CHESNOKOV, Yu M. - KOVALCHUK, M. - ANTROPOV, N. O. - KRAVTSOV, E. A. - PROGLYADO, V. V. - USTINOV, V. V. Analysis of Structural Features of Periodic Fe/Pd/Gd/Pd Multilayered Systems. In CRYSTALLOGRAPHY REPORTS. ISSN 1063-7745, 2020, vol. 65, no. 6, pp. 985-994. PFLÜGER Mika. Using grazing incidence small-angle X-ray scattering (GISAXS) for semiconductor nanometrology and defect quantification. In Doctoral thesis, dec. 2020, DOI: 10.18452/22207. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 1999 Registrované v WOS Registrované v SCOPUS Registrované v CCC 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 1999 1998 1.114
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