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Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
Názov Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings Autor Mikulik P. Spoluautori Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV SCOPUS RID ORCID Baumbach T. Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV ORCID Pinčík Emil 1956 SAVFYZIK - Fyzikálny ústav SAV ORCID Luby Štefan 1941 SAVFYZIK - Fyzikálny ústav SAV Ortega L. Tucoulou R. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Zdroj.dok. Journal of Physics D: Applied Physics. Vol. 34, no. 10A (2001), p. A188-A192. - Bristol : Institute of Physics Publishing Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rzb) Ohlasy STOERMER, M. - ANDRE, J-M - MICHAELSEN, C. - BENBALAGH, R. - JONNARD, P. X-ray scattering from etched and coated multilayer gratings. In JOURNAL OF PHYSICS D-APPLIED PHYSICS. ISSN 0022-3727, 2007, vol. 40, no. 14, pp. 4253-4258. POLACK, Francois - LAGARDE, Bruno - IDIR, Mourad - CLOUP, Audrey Liard - JOURDAIN, Erick - ROULLIAY, Marc - DELMOTTE, Franck - GAUTIER, Julien - RAVET-KRILL, Marie-Francoise. Alternate multilayer gratings with enhanced diffraction efficiency in the 500-5000 eV energy domain. In Synchrotron Radiation Instrumentation, Pts 1 and 2. ISSN 0094-243X, 2007, vol. 879, no., pp. 489-492. YAN, Minhao - GIBAUD, Alain. On the intersection of grating truncation rods with the Ewald sphere studied by grazing-incidence small-angle X-ray scattering. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2007, vol. 40, no., pp. 1050-1055. WERNECKE, Jan - SCHOLZE, Frank - KRUMREY, Michael. Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering. In REVIEW OF SCIENTIFIC INSTRUMENTS. ISSN 0034-6748, 2012, vol. 83, no. 10, art. no. 103906. RUEDA, D. R. - MARTIN-FABIANI, I. - SOCCIO, M. - ALAYO, N. - PEREZ-MURANO, F. - REBOLLAR, E. - GARCIA-GUTIERREZ, M. C. - CASTILLEJO, M. - EZQUERRA, T. A. Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2012, vol. 45, no., pp. 1038-1045. WERNECKE, Jan - KRUMREY, Michael - HOELL, Armin - KLINE, R. Joseph - LIU, Hung-Kung - WU, Wen-Li. Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2014, vol. 47, no., pp. 1912-1920. WERNECKE, Jan - GOLLWITZER, Christian - MUELLER, Peter - KRUMREY, Michael. Characterization of an in-vacuum PILATUS 1M detector. In JOURNAL OF SYNCHROTRON RADIATION. ISSN 0909-0495, 2014, vol. 21, no., pp. 529-536. SOCCIO, M. - ALAYO, N. - MARTIN-FABIANI, I. - RUEDA, D. R. - GARCIA-GUTIERREZ, M. C. - REBOLLAR, E. - MARTINEZ-TONG, D. E. - PEREZ-MURANO, F. - EZQUERRA, T. A. On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2014, vol. 47, no., pp. 613-618. SOLTWISCH, Victor - WERNECKE, Jan - HAASE, Anton - PROBST, Juergen - SCHOENGEN, Max - KRUMREY, Michael - SCHOLZE, Frank. Nanometrology on gratings with GISAXS: FEM reconstruction and fourier analysis. In METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII. ISSN 0277-786X, 2014, vol. 9050, no., article no. 905012. GOLLMER, D. A. - WALTER, F. - LORCH, C. - NOVAK, J. - BANERJEE, R. - DIETERLE, J. - SANTORO, G. - SCHREIBER, F. - KERN, D. P. - FLEISCHER, M. Fabrication and characterization of combined metallic nanogratings and ITO electrodes for organic photovoltaic cells. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, 2014, vol. 119, no., pp. 122-126. MARTÍN-FABIANI CARRATO, I. Nanoestructuración de materiales poliméricos con morfología controlada. Doctoral thesis, Universidad Complutense de Madrid. 2014, 177 pp. SUNDAY, Daniel F. - LIST, Scott - CHAWLA, Jasmeet S. - KLINE, R. Joseph. Determining the shape and periodicity of nanostructures using small-angle X-ray scattering. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2015, vol. 48, no., pp. 1355. SOCCIO, M. - RUEDA, D. R. - GARCIA-GUTIERREZ, M. C. - ALAYO, N. - PEREZ-MURANO, F. - LOTTI, N. - MUNARI, A. - EZQUERRA, T. A. Morphology of poly(propylene azelate) gratings prepared by nanoimprint lithography as revealed by atomic force microscopy and grazing incidence X-ray scattering. In POLYMER. ISSN 0032-3861, 2015, vol. 61, no., pp. 61-67. SUH, Hyo Seon - CHEN, Xuanxuan - RINCON-DELGADILLO, Paulina A. - JIANG, Zhang - STRZALKA, Joseph - WANG, Jin - CHEN, Wei - GRONHEID, Roel - DE PABLO, Juan J. - FERRIER, Nicola - DOXASTAKIS, Manolis - NEALEY, Paul F. Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2016, vol. 49, no., pp. 823-834. PERSHIN, Yu P. - DEVIZENKO, A. Yu - KONDRATENKO, V. V. - MODROW, H. - HORMES, F. J. Structural and X-ray-optical characteristics of the W/Si multilayer X-ray mirrors. In Metallofizika i Noveishie Tekhnologii. ISSN 10241809, 2016-01-01, 38, 3, pp. 367-388. FREYCHET, G. - CADOUX, C. - BLANCQUAERT, Y. - REY, S. - MARET, M. - GERGAUD, P. A study of lateral roughness evaluation through critical-dimension small angle x-ray scattering (CD-SAXS). In METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXX. ISSN 0277-786X, 2016, vol. 9778, no., pp. SOLTWISCH, Victor - LAUBIS, Christian - HERRERO, Analia Fernandez - et al. Investigating surface structures by EUV scattering. In EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VIII. ISSN 0277-786X, 2017, vol. 10143, UNSP 101430P. PFLUEGER, Mika - SOLTWISCH, Victor - PROBST, Juergen - SCHOLZE, Frank - KRUMREY, Michael. Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. In IUCRJ. ISSN 2052-2525, 2017, vol. 4, part 4, pp. 431-438. SOLTWISCH, Victor - HERRERO, Analia Fernandez - PFLUEGER, Mika - et al. Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2017, vol. 50, part 5, pp. 1524-1532. CHOI, Jaewon - GUNKEL, Ilja - LI, Yinyong - et al. Macroscopically ordered hexagonal arrays by directed self-assembly of block copolymers with minimal topographic patterns. In NANOSCALE. ISSN 2040-3364, 2017, vol. 9, no. 39, pp. 14888-14896. HERRERO, Analia Fernandez - PFLUEGER, Mika - PROBST, Juergen - SCHOLZE, Frank - SOLTWISCH, Victor. Characteristic diffuse scattering from distinct line roughnesses. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 1600-5767, 2017, vol. 50, part 6, pp. 1766-1772. HERRERO, A. Fernandez - PFLUEGER, M. - SCHOLZE, F. - et al. Fingerprinting the type of line roughness. In MODELING ASPECTS IN OPTICAL METROLOGY VI. ISSN 0277-786X, 2017, vol. 10330, UNSP 103300U. PFLUEGER, Mika - SOLTWISCH, Victor - SCHOLZE, Frank - KRUMREY, Michael. Selective measurement of small metrology targets using CD-GISAXS. In PHOTOMASK TECHNOLOGY 2017. ISSN 0277-786X, 2017, vol. 10451, UNSP 1045110. CHOI, Jaewon - LI, Yinyong - KIM, Paul Y. - LIU, Feng - KIM, Hyeyoung - YU, Duk Man - HUH, June - CARTER, Kenneth R. - RUSSELL, Thomas P. Orthogonally Aligned Block Copolymer Line Patterns on Minimal Topographic Patterns. In ACS APPLIED MATERIALS & INTERFACES. ISSN 1944-8244, 2018, vol. 10, no. 9, pp. 8324-8332. HUSSAIN, Zaineb - REDDY, V. Raghavendra - GUPTA, Mukul - DHAMGAYE, Vishal - KHANTWAL, Nitin - GUPTA, Ajay. Study of exchange bias effect in a patterned Fe/Pt multilayer with the thermal annealing. In VACUUM. ISSN 0042-207X, 2018, vol. 151, no., pp. 61-65. FREYCHET, G. - KUMAR, D. - PANDOLFI, R. - STAAKS, D. - NAULLEAU, P. - KLINE, R. J. - SUNDAY, D. - FUKUTO, M. - STRZALKA, J. - HEXEMER, A. Critical-Dimension Grazing Incidence Small Angle X-ray Scattering. In METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXXII. ISSN 0277-786X, 2018, vol. 10585, no., pp. FREYCHET, G. - KUMAR, D. - PANDOLFI, R. - STAACKS, D. - NAULLEAU, P. - KLINE, R.J, et al. Pursuing the critical dimension in etched patterns using x-ray scattering. In Metrology, Inspection, and Process Control for Microlithography XXXII. International Society for Optics and Photonics. 2018, vol. 10585, pp. 1058512. PFLUEGER, Mika - SOLTWISCH, Victor - XAVIER, Jolly - PROBST, Juergen - SCHOLZE, Frank - BECKER, Christiane - KRUMREY, Michael. Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle X-ray scattering. In JOURNAL OF APPLIED CRYSTALLOGRAPHY. ISSN 0021-8898, 2019, vol. 52, no., pp. 322-331. GOTTLIEB, S. - ROSNER, B. - EVANGELIO, L. - FERNANDEZ-REGULEZ, M. - NOGALES, A. - GARCIA-GUTIERREZ, M. C. - KELLER, T. F. - FRAXEDAS, J. - EZQUERRA, T. A. - DAVID, C. - PEREZ-MURANO, F. Self- assembly morphology of block copolymers in sub-10 nm topographical guiding patterns. In MOLECULAR SYSTEMS DESIGN & ENGINEERING. ISSN 2058-9689, 2019, vol. 4, no. 1, pp. 175-185. FREYCHET, Guillaume - KUMAR, Dinesh - PANDOLFI, Ron J. - NAULLEAU, Patrick - CORDOVA, Isvar - ERCIUS, Peter - SONG, Chengyu - STRZALKA, Joseph - HEXEMET, Alexander. Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering. In PHYSICAL REVIEW APPLIED. ISSN 2331-7019, 2019, vol. 12, no. 4, pp. HERRERO, Analia Fernandez - PFLUEGER, Mika - PROBST, Juergen - SCHOLZE, Frank - SOLTWISCH, Victor. Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings. In OPTICS EXPRESS. ISSN 1094-4087, 2019, vol. 27, no. 22, pp. 32490-32507. PFLUEGER, Mika - KLINE, R. Joseph - HERRERO, Analia Fernandez - HAMMERSCHMIDT, Martin - SOLTWISCH, Victor - KRUMREY, Michael. Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering. In JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS. ISSN 1932-5150, 2020, vol. 19, no. 1, 014001. PFLÜGER, Mika. Using grazing incidence small-angle X-ray scattering (GISAXS) for semiconductor nanometrology and defect quantification. In Doctoral thesis, dec. 2020, DOI: 10.18452/22207. HERRERO, Analia Fernandez - PFLUEGER, Mika - PULS, Jana - SCHOLZE, Frank - SOLTWISCH, Victor. Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering. In OPTICS EXPRESS. ISSN 1094-4087, 2021, vol. 29, no. 22, pp. 35580-35591. Dostupné na: https://doi.org/10.1364/OE.430416. GUTIERREZ-FERNANDEZ, Edgar - RODRIGUEZ-RODRIGUEZ, Alvaro - GARCIA-GUTIERREZ, Mari-Cruz - NOGALES, Aurora - REBOLLAR, Esther - SOLANO, Eduardo - EZQUERRA, Tiberio A. Photoinduced Resist-free Imprinting (PRI) in fullerene thin films as revealed by Grazing Incidence Small-angle X-ray scattering. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2021, vol. 548, 149254. Dostupné na: https://doi.org/10.1016/j.apsusc.2021.149254. SALAMI, Zanyar - HERRERO, Analía Fernández - ANDRLE, Anna - HÖNICKE, Philipp - SOLTWISCH, Victor. Identifying the type of line edge roughness using grazing-incidence X-ray fluorescence. In Proceedings of SPIE The International Society for Optical Engineering, 2021-01-01, 11783, pp. ISSN 0277786X. Dostupné na: https://doi.org/10.1117/12.2592611. KARPOV, A.V. Bragg’s reflections of a multilayer grating. In Izvestija Koni naučnogo centra Uraľskogo otdevenija Roccijskoj akademii nauk. 2023, vol. 62, no. 4, pp. 91-95. doi: https://izvestia.komisc.ru/images/Archive/2023/62/091.pdf. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2001 Registrované v WOS Registrované v SCOPUS Registrované v CCC 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2001 2000 1.179
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