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Effects of annealing on the properties of indium-tin oxide films prepared by ion beam sputtering
Názov Effects of annealing on the properties of indium-tin oxide films prepared by ion beam sputtering Autor Lii Ding-Fwu Spoluautori Huang J.-L. Jen Iau-Jiue Lin Su-Shia Šajgalík Pavol 1955 SAVANOCH - Ústav anorganickej chémie SAV RID ORCID Zdroj.dok. Surface and coatings technology. Vol. 192, no. 1 (2005), p. 106-111 Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy BOYCHEVA, S. - SYTCHKOVA, A.K. - GRILLI, M.L. - PIEGARI, A. Structural, optical and electrical peculiarities of r.f. plasma sputtered indium tin oxide films. In THIN SOLID FILMS. ISSN 0040-6090, OCT 15 2007, vol. 515, no. 24, p. 8469-8473. WANG, C.Y. - LIU, Y.X. - XIA, Y.L. - MA, T.C. - WANG, P.W. Characteristics of ITO films fabricated on glass substrates by high intensity pulsed ion beam method. In JOURNAL OF NON-CRYSTALLINE SOLIDS. ISSN 0022-3093, JUL 1 2007, vol. 353, no. 22-23, p. 2244-2249. AIEMPANAKIT, K. - DUMRONGRATTANA, S. - RAKKWAMSUK, P. Influence of Structural and Electrical Properties of ITO Films on Electrochromic Properties of WO3 Films. In SMART MATERIALS. ISSN 1022-6680, 2008, vol. 55-57, p. 921-924. Yun, S.H., Kim, M.S., Lee, H.D., Kim, C.K. Synthesis of ITO nano-particles by SAS method and preparation for conductive PET film with multi-layers. In JOURNAL OF THE KOREAN INDUSTRIAL AND ENGINEERING CHEMISTRY 2008, vol. 19, no. 1, p. 37-44 CHAKAROUN, M. - LUCAS, B. - RATIER, B. - DEFRANOUX, C. - PIEL, J.P. - ALDISSI, M. High quality transparent conductive electrodes in organic photovoltaic devices. In THIN SOLID FILMS. ISSN 0040-6090, DEC 15 2009, vol. 518, no. 4, Sp. Iss. SI, p. 1250-1253. CHONG, M.K. - PITA, K. - SILALAHI, S.T.H. Correlation between diffraction patterns and surface morphology to the model of oxygen diffusion into ITO films. In MATERIALS CHEMISTRY AND PHYSICS. ISSN 0254-0584, MAY 15 2009, vol. 115, no. 1, p. 154-157. VEITH, M. - RABUNG, B. - GROBELSEK, I. - KLOOK, M. - WAGNER, F.E. - QUILITZ, M. Electrochemical Synthesis of Nanocrystalline In2O3:Sn (ITO) in an Aqueous System with Ammonium Acetate as Conducting Salt. In JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. ISSN 1533-4880, APR 2009, vol. 9, no. 4, p. 2616-2627. VENKATACHALAM, S. - NANJO, H. - HASSAN, F.M.B. - KAWASAKI, K. - KANAKUBO, M. - AIZAWA, T. - AIDA, T. - EBINA, T. Characterization of nanocrystalline indium tin oxide thin films prepared by ion beam sputter deposition method. In THIN SOLID FILMS. ISSN 0040-6090, SEP 30 2010, vol. 518, no. 23, p. 6891-6896. KIM, Y.J. - JIN, S.B. - KIM, S.I. - CHOI, Y.S. - CHOI, I.S. - HAN, J.G. Effect of oxygen flow rate on ITO thin films deposited by facing targets sputtering. In THIN SOLID FILMS. ISSN 0040-6090, SEP 1 2010, vol. 518, no. 22, SI, p. 6241-6244. CHAKAROUN, M. - EL AMRANI, A. - LUCAS, B. - RATIER, B. - ALDISSI, M. Organic optoelectronic devices-flexibility versus performance. In EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS. ISSN 1286-0042, SEP 2010, vol. 51, no. 3. KUO, Chin-Chiuan - LIU, Chi-Chang - HE, Shao-Chih - CHANG, Jing-Tang - HE, Ju-Liang. Influence of assistant ion beam on the opto-electrical properties of molybdenum doped zinc oxide films deposited on polyethersulfone via dual ion beam sputtering. In VACUUM, 2011, vol.85, no.10, 961. VENKATACHALAM, S. - NANJO, H. - KAWASAKI, K. - WAKUI, Y. - HAYASHI, H. - EBINA, T. Preparation and characterization of nanocrystalline ITO thin films on glass and clay substrates by ion-beam sputter deposition method. In APPLIED SURFACE SCIENCE, 2011, vol.257, no.21, 8923. GROBELSEK, Ingrid - RABUNG, Benjamin - QUILITZ, Mario - VEITH, Michael. Electrochemical synthesis of nanocrystalline zinc oxide and phase transformations of zinc hydroxides. In JOURNAL OF NANOPARTICLE RESEARCH, 2011, vol.13, no.10, 5103. SONG, Shumei - YANG, Tianlin - LIU, Jingjing - XIN, Yanqing - LI, Yanhui - HAN, Shenghao. Rapid thermal annealing of ITO films. In APPLIED SURFACE SCIENCE, 2011, vol.257, no.16, 7061. OHSHIMA, Tamiko - MURAKAMI, Yuuki - KAWASAKI, Hiroharu - SUDA, Yoshiaki - YAGYU, Yoshihito. Effect of Oxygen Gas Pressure on Electrical, Optical, and Structural Properties of Al-Doped ZnO Thin Films Fabricated by Pulsed Laser Deposition for Use as Transparent Electrodes in All-Solid-State Electrochromic Devices. In JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, vol.50, no.8. WANG, D. - DU, J. - LI, X. - XU, Y. - LI, Y. Photoluminescence properties of indium tin oxide films deposited on glass substrate. In Zhongguo Jiguang/Chinese Journal of Lasers, 2011, vol.38, no.1. EL HAJJ, A. - LUCAS, B. - CHAKAROUN, M. - ANTONY, R. - RATIER, B. - ALDISSI, M. Optimization of ZnO/Ag/ZnO multilayer electrodes obtained by Ion Beam Sputtering for optoelectronic devices. In THIN SOLID FILMS. ISSN 0040-6090, 2012, vol. 520, no. 14, pp. 4666. KUO, Chin-Chiuan - LIU, Chi-Chang - HE, Shao-Chih - CHANG, Jing-Tang - HE, Ju-Liang. Effects of Additional Oxygen Flow on the Optical and Electrical Properties of Ion Beam Sputtering Deposited Molybdenum-Doped Zinc Oxide Layer. In JOURNAL OF NANOMATERIALS. ISSN 1687-4110, 2012, vol., no., pp. WORASUKHKHUNG, S. - PUDWAT, Sayan - EIAMCHAI, Pitak - HORPRATHUM, Mati - DUMRONGRATTANA, Supattanapong - AIEMPANAKIT, Kamon. Hydrophilic property of TiO2 films sputtered on glass/ITO for self cleaning glass and heat mirror application. In Procedia Engineering. ISSN 18777058, 2012-12-01, 32, pp. 780-786. KIM, Bong Seock - PARK, Ji Hyun - HONG, Nayeong - BAE, Joonwon - YANG, Cheol-Soo - SHIN, Kyusoon. Ultrathin carbon film from carbonization of spin-cast polyacrylonitrile film. In JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY. ISSN 1226-086X, 2013, vol. 19, no. 5, pp. 1631. KIM, Yoonsuk - PARK, Seungho - KIM, Byung-Kuk - KIM, Hyoung June - HWANG, Jin-Ha. Xe-arc flash annealing of indium tin oxide thin-films prepared on glass backplanes. In INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER. ISSN 0017-9310, 2015, vol. 91, no., pp. 543. OHSHIMA, Tamiko - MAEDA, Takashi - TANAKA, Yuki - KAWASAKI, Hiroharu - YAGYU, Yoshihito - IHARA, Takeshi - SUDA, Yoshiaki. Sputtering deposition of Al-doped zinc oxide thin films using mixed powder targets. In JAPANESE JOURNAL OF APPLIED PHYSICS. ISSN 0021-4922, 2016, vol. 55, no. 1, pp. LI, Jiaming - JIANG, Liangbao - CHEN, Mu - LI, Xiaoyu - WEI, Youxiu - MA, Yibo - FU, Ziyi - YAN, Yue. Structure and physical properties evolution of ITO film during amorphous-crystalline transition using a highly effective annealing technique. In CERAMICS INTERNATIONAL. ISSN 0272-8842, 2019, vol. 45, no. 13, pp. 16214-16225. BUNDESMANN, Carsten - HELLMICH, Anke. Energy distributions of secondary ions for the Ar ion beam sputtering of indium tin oxide. In JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. ISSN 2166-2746, 2020, vol. 38, no. 6, pp. Dostupné na: https://doi.org/10.1116/6.0000516. TAHA, Juhaina M. - NASSIF, Rafah Alwan - NUMAN, Najwan H. - FAKHRI, Makram A. Effects of oxygen gas on the physical properties of tin oxide nano films using laser light as ablation source. In AIP Conference Proceedings. ISSN 0094243X, 2020-03-25, 2213, pp. Dostupné na: https://doi.org/10.1063/5.0000198. BUNDESMANN, Carsten - BAUER, Jens - FINZEL, Annemarie - GERLACH, Juergen W. - KNOLLE, Wolfgang - HELLMICH, Anke - SYNOWICKI, Ron. Properties of indium tin oxide thin films grown by Ar ion beam sputter deposition. In JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. ISSN 0734-2101, 2021, vol. 39, no. 3, pp. Dostupné na: https://doi.org/10.1116/6.0000917. RANI, S. - TARIQ, M. - BHATTI, M.H. - ABDELMOHSEN, S.A.M. - ALANAZI, M.M. - KHAN, M.A. - ASIF, H.M. - NADEEM, M. - KHAN, R. A simplistic approach for the synthesis of Covalent Organic Frameworks (COFs) comprising of tetrafunctionalized porphyrin and polyoxometalates to uncover catalytic applications. In OPTICAL MATERIALS. ISSN 0925-3467, APR 2023, vol. 138. Dostupné na: https://doi.org/10.1016/j.optmat.2023.113672. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2005 Registrované v WOS Registrované v SCOPUS DOI 10.1016/j.surfcoat.2004.03.025 článok
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