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Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
Názov Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering Autor Šiffalovič Peter 1975 SAVFYZIK - Fyzikálny ústav SAV ORCID Spoluautori Majková Eva 1950 SAVFYZIK - Fyzikálny ústav SAV ORCID Chitu Lívia SAVFYZIK - Fyzikálny ústav SAV Jergel Matej 1954- SAVFYZIK - Fyzikálny ústav SAV SCOPUS RID ORCID Luby Štefan 1941 SAVFYZIK - Fyzikálny ústav SAV Spoluautori Keckes J. Maier G. Timmann A. Roth S.V. Tsuru T. Harada T. Yamamoto M. Heinzmann U. Zdroj.dok. Vacuum. Vol. 84, no. 1 (2009), p. 19-25 Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy HASSE, B. - WIESMANN, J. - MICHAELSEN, C. New microfocus source for X-ray diffractometry in the home-lab. In Proceedings of SPIE, 2009, vol.7448, 74480Q. VAN DEN BOOGAARD, A. J. R. - ZOETHOUT, E. - MAKHOTKIN, I. A. - LOUIS, E. - BIJKERK, F. Influence of noble gas ion polishing species on extreme ultraviolet mirrors. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2012, vol. 112, no. 12, 123502. WERNECKE, Jan - SCHOLZE, Frank - KRUMREY, Michael. Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering. In REVIEW OF SCIENTIFIC INSTRUMENTS. ISSN 0034-6748, 2012, vol. 83, no. 10, 103906. HAASE, Anton - SOLTWISCH, Victor - LAUBIS, Christian - SCHOLZE, Frank. Role of dynamic effects in the characterization of multilayers by means of power spectral density. In APPLIED OPTICS. ISSN 1559-128X, 2014, vol. 53, no. 14, pp. 3019. LI, Haochuan - ZHU, Jingtao - WANG, Zhanshan - CHEN, Hong - WANG, Yuzhu - WANG, Jie. Integration method for directly analyzing interface statistics of periodic multilayers from X-ray scattering. In Journal of Synchrotron Radiation. ISSN 09090495, 2014-01-01, 21, 1, pp. 97-103. PRADHAN, P. C. - MAJHI, A. - NAYAK, M. - NAND, Mangla - RAJPUT, P. - SHUKLA, D. K. - BISWAS, A. - RAI, S. K. - JHA, S. N. - BHATTACHARYYA, D. - PHASE, D. M. - SAHOO, N. K. Interface structure in nanoscale multilayers near continuous-to-discontinuous regime. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2016, vol. 120, no. 4, 045308. MARUYAMA, R. et al. Study of the in-plane magnetic structure of a layered system using polarized neutron scattering under grazing incidence geometry. In NUCLAR INSTRUMENTS AND METHODS IN PHYS. RESEARCH A, 2016, vol. 819, pp. 37-53. JIANG, Hui - YAN, Shuai - LIANG, Dongxu - TIAN, Naxi - WANG, Hua - LI, Aiguo. X-ray multilayer mid-frequency characterizations using speckle scanning techniques. In ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VII. ISSN 0277-786X, 2017, vol. 10385, UNSP 103850Q. HU, Yangsen - HU, Zhiyu. Ultra-low thermal conductivity on Si/Au multilayer films with metal layer thickness below 8 nm. In SUPERLATTICES AND MICROSTRUCTURES. ISSN 0749-6036, 2017, vol. 110, pp. 265-272. PIVAC, Branko - DUBCEK, Pavo - DASOVIC, Jasna - POPOVIC, Jasminka - RADIC, Nikola - BERNSTORFF, Sigrid - ZAVASNIK, Janez - VLAHOVIC, Branislav. Stress Evolution during Ge Nanoparticles Growth in a SiO2 Matrix. In INORGANIC CHEMISTRY. ISSN 0020-1669, 2018, vol. 57, no. 23, pp. 14939-14952. HU, Yangsen - WU, Zhenghua - YE, Fengjie - HU, Zhiyu. Effects of interfaces on the thermal conductivity in Si/Si0.75Ge0.25 multilayer with varying Au layers. In MATERIALS RESEARCH EXPRESS. ISSN 2053-1591, 2018, vol. 5, no. 2, 026415. SALAMON, K. - DUBCEK, P. - DRAZIC, G. - BERNSTORFF, S. - RADIC, N. Lateral inhomogeneities in W/C multilayer mirrors. In THIN SOLID FILMS. ISSN 0040-6090, 2019, vol. 691, 137611. MEDVEDEV, R. V. - NIKOLAEV, K. V. - ZAMESHIN, A. A. - IJPES, D. - MAKHOTKIN, I. A. - YAKUNIN, S. N. - YAKSHIN, A. E. - BIJKERK, F. Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures. In JOURNAL OF APPLIED PHYSICS. ISSN 0021-8979, 2019, vol. 126, no. 4, 045302. JIANG, Hui - YA, Shuai - TIAN, Naxi - LIANG, Dongxu - DONG, Zhaohui - ZHENG, Yi. Extraction of medium-spatial-frequency interfacial waviness and inner structure from X-ray multilayers using the speckle scanning technique. In OPTICAL MATERIALS EXPRESS. ISSN 2159-3930, 2019, vol. 9, no. 7, pp. 2878-2891. NIKOLAEV, K. - YAKUNIN, S. N. - MAKHOTKIN, I. A. - DE LA RIE, J. - MEDVEDEV, R. - ROGACHEV, A. - TRUNCKIN, I. N. - VASILIEV, A. L. - HENDRIKX, C. P. - GATESHKI, M. - VAN DE KRUIJS, R. W. E. - BIJKERK, F. Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers. In ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES. ISSN 2053-2733, 2019, vol. 75, pp. 342-351. RAGULSKAYA, A. - ANDREEVA, M. A. - ROGACHEV, A. - YAKUNIN, S. N. The investigation of [Fe/Cr] multilayer by GISAXS. In SUPERLATTICES AND MICROSTRUCTURES. ISSN 0749-6036, 2019, vol. 125, pp. 16-25. JIANG, Hui - HUA, Wenqiang - TIAN, Naxi - LI, Aiguo - LI, Xiuhong - HE, Yumei - ZHANG, Zengyan. In situ GISAXS study on the temperature-dependent performance of multilayer monochromators from the liquid nitrogen cooling temperature to 600 degrees C. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2020, vol. 508, 144838. HU, Z. - WU, Z. Research Background and Current Situation. In NANOSTRUCTURED THERMOELECTRIC FILMS, 2020, Springer, Singapore, p. 1 – 26, https://doi.org/10.1007/978-981-15-6518-2_1 PLESHKOV, Roman - CHKHALO, Nikolay - POLKOVNIKOV, Vladimir - SVECHNIKOV, Mikhail - ZORINA, Maria. Intrinsic roughness and interfaces of Cr/Be multilayers. In JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2021, vol. 54, no., pp. 1747-1756. Dostupné na: https://doi.org/10.1107/S160057672101027X. SAJTI, Szilard. Domain-domain correlation functions used in off-specular scattering. In PHYSICA A-STATISTICAL MECHANICS AND ITS APPLICATIONS, 2023, vol. 623, no., pp. ISSN 0378-4371. Dostupné na: https://doi.org/10.1016/j.physa.2023.128853. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2009 Registrované v WOS Registrované v SCOPUS Registrované v CCC DOI 10.1016/j.vacuum.2009.04.026 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2009 2008 1.114 Q3 0.566 Q2
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