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Micromachined atomic force microscopy sensor with integrated piezoresistive, sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
Názov Micromachined atomic force microscopy sensor with integrated piezoresistive, sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes Autor Pedrak R. Spoluautori Ivanov T. Ivanova K. Gotszalk T. Abedinov N. Rangelow I.W. Edinger K. Tomerov E. Schenkel T. Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Zdroj.dok. Journal of Vacuum Science and Technology B. Vol. 21, no. 6 (2013), p. 3102-3107, Microelectronics and Nanometer Structures Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy JIANG, L - CHEUNG, R - HEDLEY, J - HASSAN, M - HARRIS, AJ - BURDESS, JS - MEHREGANY, M - ZORMAN, CA. SiC cantilever resonators with electrothermal actuation. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, 2006, vol. 128, no. 2, pp. 376. GAITAS, Angelo - GIANCHANDANI, Yogesh B. An experimental study of the contact mode AFM scanning capability of polyimide cantilever probes. 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CARSTENS, N. - TERASA, M.I. - HOLTZ, P. - KAPS, S. - STRUNSKUS, T. - HASSANIEN, A. - ADELUNG, R. - FAUPEL, F. - VAHL, A. Memristive switching: from individual nanoparticles towards complex nanoparticle networks. In Bio-Inspired Information Pathways: From Neuroscience to Neurotronics. Springer. ISBN 978-3-031-36704-5, 2023, pp. 219-239. PRAYOGI, S. Thin layer deposition of a-Si: H n-type hydrogenated amorphous silicon using PECVD. In Journal of Science and Informatics for Society (JSIS). 2023, vol. 1, no. 1, pp. 14-18. https://jsis.universitaspertamina.ac.id/index.php/JSIS/article/view/21. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2003 Registrované v WOS Registrované v SCOPUS Registrované v CCC DOI 10.1116/1.1614252 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2013 2012 1.267 Q2 0.631
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