Počet záznamov: 1
Bulk micromachining of SiC substrate for MEMS sensor applications
Názov Bulk micromachining of SiC substrate for MEMS sensor applications Autor Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Spoluautori Hudek Peter 1953- SAVINFO - Ústav informatiky SAV SCOPUS RID ORCID Zehetner J. Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Choleva P. Kutiš V. Vallo Martin SAVELEK - Elektrotechnický ústav SAV Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Zdroj.dok. Microelectronic Engineering. Vol. 110, (2013), p. 260-264 Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy PREUSCH, Florian - ADELMANN, Benedikt - HELLMANN, Ralf. Micromachining of AlN and Al2O3 Using Fiber Laser. In MICROMACHINES. ISSN 2072-666X, 2014, vol. 5, no. 4, pp. 1051. FRISCHMUTH, Tobias - SCHNEIDER, Michael - GRILLE, Thomas - SCHMID, Ulrich. Effect of Reactive Gas Flow Ratio on IC-PECVD Deposited a-SiC:H Thin Films. In 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014). ISSN 1877-7058, 2014, vol. 87, no., pp. 128. LECLAIRE, P. - CHENOT, S. - BUCHAILLOT, L. - CORDIER, Y. - THERON, D. - FAUCHER, M. AlGaN/GaN HEMTs with very thin buffer on Si (111) for nanosystems applications. In SEMICONDUCTOR SCIENCE AND TECHNOLOGY. ISSN 0268-1242, 2014, vol. 29, no. 11, pp. OLHERO, S. M. - KAUSHAL, A. - ANTUNES, P. - FERREIRA, J. M. F. Microfabrication of high aspect ratio BST pillar arrays by epoxy gel casting from aqueous suspensions with added water soluble epoxy resin. In MATERIALS RESEARCH BULLETIN. ISSN 0025-5408, 2014, vol. 60, no., pp. 830. SAVRIAMA, Guillaume - BAILLET, Francis - BARREAU, Laurent - BOULMER-LEBORGNE, Chantal - SEMMAR, Nadjib. Optimization of diode pumped solid state ultraviolet laser dicing of silicon carbide chips using design of experiment methodology. In JOURNAL OF LASER APPLICATIONS. ISSN 1042-346X, 2015, vol. 27, no. 3, pp. ASADI, Esmail - RISSING, Lutz. High surface quality of sintered silicon carbide by chemical mechanical polishing. In Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015, 2015-01-01, pp. 41-42. KUBIAK, A. - RUTH, L. - ROSOWSKI, A. - FRENCH, P. Laser processing for bevel termination of high voltage pn junction in SiC. In INTERNATIONAL CONFERENCE ON MICROTECHNOLOGY AND THERMAL PROBLEMS IN ELECTRONICS (MICROTHERM'2015) AND INTERNATIONAL CONFERENCE ON SMART ENGINEERING OF NEW MATERIALS (SENM'2015). ISSN 1742-6588, 2016, vol. 709, no., pp. MU, F. - IGUCHI, K. - NAKAZAWA, H. - TAKAHASHI, Y. - FUJINO, M. - SUGA, T. Direct Wafer Bonding of SiC-SiC by SAB for Monolithic Integration of SiC MEMS and Electronics. In ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. ISSN 2162-8769, 2016, vol. 5, no. 9, pp. P451-P456. DENKENA, Berend - WURZ, Marc - GROVE, Thilo - BOUABID, Abdelhamid - ASADI, Esmail. Manufacturing of micro end mills by batch processing of silicon carbide. In Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, 2016-01-01, pp. KAUSHAL, A. - OLHERO, S. M. - SINGH, Budhendra - BHARDWAJ, Chandan - SHARMA, Ishu - BDIKIN, Igor - BUTTON, Tim - FERREIRA, J. M. F. 3D multiscale controlled micropatterning of lead-free piezoelectric electroceramics via Epoxy Gel Casting and lift-off. In JOURNAL OF THE EUROPEAN CERAMIC SOCIETY. ISSN 0955-2219, 2017, vol. 37, no. 9, pp. 3079-3087. WANG, Chengwu - KUROKAWA, Syuhei - DOI, Toshiro - YUAN, Julong - SANO, Yasuhisa - AIDA, Hideo - ZHANG, Kehua - DENG, Qianfa. The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP). In ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. ISSN 2162-8769, 2017, vol. 6, no. 4, pp. P105-P112. LI, Jian - GENG, Daxi - ZHANG, Deyuan - QIN, Wei - JIANG, Yonggang. Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms. In CERAMICS INTERNATIONAL. ISSN 0272-8842, 2018, vol. 44, no. 3, pp. 3107-3112. SHI, Yunbo - SUN, Yanan - LIU, Jun - TANG, Jun - LI, Jie - MA, Zongmin - CAO, Huiliang - ZHAO, Rui - KOU, Zhiwei - HUANG, Kun - GAO, Jinyang - HOU, Tianxi. UV nanosecond laser machining and characterization for SiC MEMS sensor application. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, 2018, vol. 276, no., pp. 196-204. AONO, Yuko - OGAWA, Koki - HIRATA, Atsushi. Surface modification of single-crystalline silicon carbide by laser irradiation for microtribological applications. In PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY. ISSN 0141-6359, 2018, vol. 54, no., pp. 198-205. MU, Fengwen - SUN, Yechao - SHANG, Haiping - WANG, Yinghui - SUGA, Tadatomo - WANG, Weibing - CHEN, Dapeng. Feasibility study of all-SiC pressure sensor fabrication without deep etching. In 2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018, 2018-06-06, pp. 558-561. WU, Chen - FANG, Xudong - LIU, Feng - GUO, Xin - MAEDA, Ryutaro - JIANG, Zhuangde. High speed and low roughness micromachining of silicon carbide by plasma etching aided femtosecond laser processing. In CERAMICS INTERNATIONAL. ISSN 0272-8842, 2020, vol. 46, no. 11, pp. 17896-17902. KUMAR, Aniruddha - BHATT, R. B. - BISWAS, D. J. Parametric characterization of underwater laser ablation vis-a-vis laser-assisted standard defect simulation in sintered UO2 pellets. In JOURNAL OF NUCLEAR MATERIALS. ISSN 0022-3115, 2020, vol. 540, no., pp. ZHAO, Rongmin - LIU, Fangfang - YANG, Zihan - LIN, Fanghui. Method for Nano-scale Displacement Measurement Based on Fiber Bragg Grating. In Proceedings of 2020 IEEE International Conference on Artificial Intelligence and Computer Applications, ICAICA 2020, 2020-06-01, pp. 814-818. CHEN, Zhaojie - ZHAN, Shunda - ZHAO, Yonghua. Electrochemical jet-assisted precision grinding of single-crystal SiC using soft abrasive wheel. In INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES. ISSN 0020-7403, 2021, vol. 195, no., pp. Dostupné na: https://doi.org/10.1016/j.ijmecsci.2020.106239. ZHAN, Shunda - DONG, Bangyan - WANG, Hongqiang - ZHAO, Yonghua. A novel approach for bulk micromachining of 4H-SiC by tool-based electrolytic plasma etching in HF-free aqueous solution. In JOURNAL OF THE EUROPEAN CERAMIC SOCIETY. ISSN 0955-2219, 2021, vol. 41, no. 10, pp. 5075-5087. Dostupné na: https://doi.org/10.1016/j.jeurceramsoc.2021.04.012. WANG, Lukang - ZHAO, You - YANG, Zixuan - ZHAO, Yulong - YANG, Xinwan - GONG, Taobo - LI, Cun. Femtosecond laser micromachining in combination with ICP etching for 4H-SiC pressure sensor membranes. In CERAMICS INTERNATIONAL. ISSN 0272-8842, 2021, vol. 47, no. 5, pp. 6397-6408. Dostupné na: https://doi.org/10.1016/j.ceramint.2020.10.220. WANG, Hongjian - YANG, Tao - LIAO, Runqian - SONG, Chang. Research Progress on Laser Drilling of Silicon Carbide and Its Power Devices. In Bandaoti Guangdian/Semiconductor Optoelectronics. ISSN 10015868, 2021-08-01, 42, 4, pp. 458-463 and 478 Dostupné na: https://doi.org/10.16818/j.issn1001-5868.2021.04.002. HAJARE, Raju - REDDY, Vishnuvardhan - SRIKANTH, R. MEMS based sensors – A comprehensive review of commonly used fabrication techniques. In Materials Today: Proceedings, 2021-01-01, 49, pp. 720-730. Dostupné na: https://doi.org/10.1016/j.matpr.2021.05.223. CAO, Z. - WEN, Q. - WANG, X. - YANG, Q. - JIANG, F. An overview of the miniaturization and endurance for wearable devices. In Journal on Internet of Things. 2021, vol. 3, no. 1, pp. 11-17. doi: 10.32604/jiot.2021.010404. WANG, Lukang - ZHAO, You - YANG, Yu - ZHAO, Yulong. Two-step femtosecond laser etching for bulk micromachining of 4H-SiC membrane applied in pressure sensing. In CERAMICS INTERNATIONAL, 2022, vol. 48, no. 9, pp. 12359-12367. ISSN 0272-8842. Dostupné na: https://doi.org/10.1016/j.ceramint.2022.01.100. ZHAN, Shunda - LU, Jiajun - ZHAO, Yonghua. Observation and modulation of gas film and plasma behavior in electrolytic plasma hybrid etching of semiconductor material 4H-SiC. In PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2022, vol. 74, no., pp. 403-413. ISSN 0141-6359. Dostupné na: https://doi.org/10.1016/j.precisioneng.2021.12.005. WANG, Hong Jian - YANG, Tao - DENG, Fu Qin. Study on femtosecond laser processing of special-shaped hole in silicon carbide ceramic. In Proceedings of SPIE The International Society for Optical Engineering, 2022-01-01, 12351, pp. ISSN 0277786X. Dostupné na: https://doi.org/10.1117/12.2651916. CHEN, J.J. - WU, H. - BAI, S.H. - HUANG, J.L. Response of mechanical properties and subsurface damage in β-SiC to temperature and crystal plane during nanoindentation simulation. In MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING. ISSN 1369-8001, OCT 2023, vol. 165. Dostupné na: https://doi.org/10.1016/j.mssp.2023.107651. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2013 Registrované v WOS Registrované v SCOPUS Registrované v CCC DOI 10.1016/j.mee.2013.01.046 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2013 2012 1.224 Q2 0.737 Q1
Počet záznamov: 1