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AlGaN/GaN diaphragm-based pressure sensor with direct high performance piezoelectric transduction mechanism
Názov AlGaN/GaN diaphragm-based pressure sensor with direct high performance piezoelectric transduction mechanism Autor Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Spoluautori Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Držík Milan Rýger Ivan 1987 SAVELEK - Elektrotechnický ústav SAV Kutiš V. Zehetner J. Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Zdroj.dok. Applied Physics Letters. Vol. 107, (2015), 122102 Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy Zhu, Y.-X., Wang, Y.-H., Song, H.-H., Li, L.-L., Shi, D. Faguang Xuebao/Chinese Journal of Luminescence 37 (2016), pp. 1545-1553 CHROMIK, S. - SOJKOVA, M. - VRETENAR, V. - ROSOVA, A. - DOBROCKA, E. - HULMAN, M. In APPLIED SURFACE SCIENCE. FEB 15 2017, vol. 395, p. 232-236. WANG, D.F. - LOU, X.Q. - BAO, A.J. - YANG, X. - ZHAO, J. In APPLIED PHYSICS LETTERS. AUG 21 2017, vol. 111, no. 8. GHOUILA-HOURI, C. - TALBI, A. - VIARD, R. - MOUTAOUEKKIL, M. - ELMAZRIA, O. - GALLAS, Q. - GARNIER, E. - MERLEN, A. - PERNOD, P. In APPLIED PHYSICS LETTERS. SEP 11 2017, vol. 111, no. 11. PARK, S.J. - KIM, J. - CHU, M. - KHINE, M. Flexible Piezoresistive Pressure Sensor Using Wrinkled Carbon Nanotube Thin Films for Human Physiological Signals. In ADVANCED MATERIALS TECHNOLOGIES. JAN 2018, vol. 3, no. 1. CHENG, Q. - YANG, Z. Simulation of Gallium Nitride Cantilevers Integrated with AlGaN/GaN HEMTs. In 2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT). 2018, p. 416-418. TONG, W.L. - TANG, W. - ZHANG, Z.J. Electron transport in AlGaN/GaN HEMTs using a strain model. In COMPUTATIONAL MATERIALS SCIENCE. FEB 15 2018, vol. 143, p. 391-397. WANG, A.S. - ZENG, L.Y. - WANG, W. - CALLE, F. Modification of strain and 2DEG density induced by wafer bending of AlGaN/GaN heterostructure: Influence of edges caused by processing. In AIP ADVANCES. MAR 2018, vol. 8, no. 3. MA, Y.J. - XIAO, J.Y. - ZHANG, Q.Y. - MA, C.Y. - JIANG, X.N. - WU, B.Y. - ZENG, X.Y. Perovskite LaBaCo2O5+delta (LBCO) single-crystal thin films for pressure sensing applications. In APPLIED PHYSICS LETTERS. APR 23 2018, vol. 112, no. 17. GAJULA, D. - JAHANGIR, I. - KOLEY, G. High Temperature AlGaN/GaN Membrane Based Pressure Sensors. In MICROMACHINES. MAY 2018, vol. 9, no. 5. TAN, X. - LV, Y.J. - ZHOU, X.Y. - WANG, Y.G. - SONG, X.B. - GU, G.D. - JI, P.F. - YANG, X.L. - SHEN, B. - FENG, Z.H. - CAI, S.J. AlGaN/GaN pressure sensor with a Wheatstone bridge structure. In AIP ADVANCES. AUG 2018, vol. 8, no. 8. WANG, Ashu - ZENG, Lingyan - WANG, Wen - LUO, Zhenghua. Static and dynamic simulation studies on the AlGaN/GaN pressure sensor. In SEMICONDUCTOR SCIENCE AND TECHNOLOGY. ISSN 0268-1242, 2019, vol. 34, no. 11, pp. HSU, An-Jie - CHANG, Kao-Shuo. Physical, photochemical, and extended piezoelectric studies of orthorhombic ZnSnN2 nanocolumn arrays. In APPLIED SURFACE SCIENCE. ISSN 0169-4332, 2019, vol. 470, no., pp. 19-26. HAO, Lanzhong - LIU, Hui - XU, Hanyang - DONG, Shichang - DU, Yongjun - WU, Yupeng - ZENG, Huizhong - ZHU, Jun - LIU, Yunjie. Flexible Pd-WS2/Si heterojunction sensors for highly sensitive detection of hydrogen at room temperature. In SENSORS AND ACTUATORS B-CHEMICAL, 2019, vol. 283, no., pp. 740-748. KUMAR, A. - PRASAD, M. - JANYANI, V. - YADAV, R.P. Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors. In IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. ISSN 0894-6507, NOV 2020, vol. 33, no. 4, p. 606-613. SUN, J.W. - HU, D. - LIU, Z.W. - MIDDELBURG, L.M. - VOLLEBREGT, S. - SARRO, P.M. - ZHANG, G.Q. Low power AlGaN/GaN MEMS pressure sensor for high vacuum application. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, OCT 15 2020, vol. 314. TAN, X. - LV, Y.J. - ZHOU, X.Y. - WANG, Y.G. - SONG, X.B. - YANG, X.L. - SHEN, B. - FENG, Z.H. - CAI, S.J. Direct-readout pressure sensor based on AlGaN/GaN heterostructure. In MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. ISSN 0946-7076, OCT 2020, vol. 26, no. 10, SI, p. 3189-3192. PHAM, T.A. - QAMAR, A. - DINH, T. - MASUD, M.K. - RAIS-ZADEH, M. - SENESKY, D.G. - YAMAUCHI, Y. - NGUYEN, N.T. - PHAN, H.P. Nanoarchitectonics for Wide Bandgap Semiconductor Nanowires: Toward the Next Generation of Nanoelectromechanical Systems for Environmental Monitoring. In ADVANCED SCIENCE. NOV 2020, vol. 7, no. 21. VAN ERP, R. - SOLEIMANZADEH, R. - NELA, L. - KAMPITSIS, G. - MATIOLI, E. Co-designing electronics with microfluidics for more sustainable cooling. In NATURE. ISSN 0028-0836, SEP 10 2020, vol. 585, no. 7824, p. 211-+. TAN, X. - LV, Y.J. - ZHOU, X.Y. - SONG, X.B. - WANG, Y.G. - GU, G.D. - GUO, H.Y. - LIANG, S.X. - FENG, Z.H. - CAI, S.J. High performance AlGaN/GaN pressure sensor with a Wheatstone bridge circuit. In MICROELECTRONIC ENGINEERING. ISSN 0167-9317, JAN 15 2020, vol. 219. WANG, Ashu - ZENG, Lingyan - WANG, Wen. Study on the GaN/AlGaN Piezotronic Effect Applied in Pressure Sensors. In ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2021, vol. 10, no. 3, pp. ISSN 2162-8769. Dostupné na: https://doi.org/10.1149/2162-8777/abeecf. GUO, Xinge - LIU, Long - ZHANG, Zixuan - GAO, Shan - HE, Tianyiyi - SHI, Qiongfeng - LEE, Chengkuo. Technology evolution from micro-scale energy harvesters to nanogenerators. In JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021, vol. 31, no. 9, pp. ISSN 0960-1317. Dostupné na: https://doi.org/10.1088/1361-6439/ac168e. WANG, Rui-Rong - GUO, Hao - TANG, Jun - LIU, Jin-Ping - LIU, Li-Shuang. Research on the Force-Sensitive Characteristic of InAs QD Embedded in HEMT. In MICROMACHINES, 2021, vol. 12, no. 11, pp. Dostupné na: https://doi.org/10.3390/mi12111413. BELWANSHI, Vinod - TOPKAR, Anita. Quantitative Analysis of MEMS Piezoresistive Pressure Sensors Based on Wide Band Gap Materials. In IETE Journal of Research, 2022-01-01, 68, 1, pp. 667-677. ISSN 03772063. Dostupné na: https://doi.org/10.1080/03772063.2019.1620641. JIANG, Jie - WANG, Tieyang - HU, Shengdong - HE, Zhiyuan - HUANG, Yun - WU, Hao - HUI, Caixin - SHI, Yijun - LU, Guoguang. Reliability Experiment and Simulation of Top-side Cooled E-mode AlGaN/GaN Power Device under Different Strains. In 2022 23rd International Conference on Electronic Packaging Technology, ICEPT 2022, 2022-01-01, pp. Dostupné na: https://doi.org/10.1109/ICEPT56209.2022.9872587. NGUYEN, H.Q. - FOISAL, A.M. - TANNER, P. - NGUYEN, T.H. - ABEROUMAND, S. - DAU, V. - DINH, T. - DIMITRIJEV, S. - PHAN, H.P. - NGUYEN, N.T. - DAO, D.V. Giant Piezotronic Effect by Photoexcitation-Electronic Coupling in a p-GaN/AlGaN/GaN Heterojunction. In ACS APPLIED ELECTRONIC MATERIALS. JUN 28 2022, vol. 4, no. 6, p. 2648-2655. Dostupné na: https://doi.org/10.1021/acsaelm.2c00111. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2015 Registrované v WOS Registrované v CCC DOI 10.1063/1.4931436 
článok
rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2015 2014 3.302 Q1 1.861 Q1
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