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Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
Názov Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors Autor Zehetner J. Spoluautori Kraus S. Lucki M. Vanko Gabriel 1981 SAVELEK - Elektrotechnický ústav SAV ORCID Dzuba Jaroslav 1987 SAVELEK - Elektrotechnický ústav SAV Lalinský Tibor 1951 SAVELEK - Elektrotechnický ústav SAV Zdroj.dok. Microsystem Technologies-micro-and nanosystems-onformation storage and processing systems. Vol. 22 (2016), p. 1883-1892 Jazyk dok. eng - angličtina Druh dok. rozpis článkov z periodík (rbx) Ohlasy DOWLING, K.M. - RANSOM, E.H. - SENESKY, D.G. In JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. FEB 2017, vol. 26, no. 1, p. 135-142. CHAUHAN, A. - PATEL, S. - KUMAR, A. - PONOMAREVA, I. - KUMAR, R. - VAISH, R. Pyro-paraelectric effect in ferroelectric materials: A device perspective for transcending Curie limitation. In MATERIALS TODAY COMMUNICATIONS. SEP 2017, vol. 12, p. 146-151. LI, J. - GENG, D.X. - ZHANG, D.Y. - QIN, W. - JIANG, Y.G. Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms. In CERAMICS INTERNATIONAL. FEB 15 2018, vol. 44, no. 3, p. 3107-3112. ZHAO, Y. - ZHAO, Y.L. - WANG, L.K. Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor. In SENSORS AND ACTUATORS A-PHYSICAL. ISSN 0924-4247, JUL 1 2020, vol. 309. CHEN, Rong - ZHOU, Cong - XIE, Jin - CHEN, Zhaojie. Experimental study on rolling and brittle fracture to single crystal silicon and sapphire by diamond cutter wheel. In Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022-03-25, 30, 6, pp. 702-710. ISSN 1004924X. Dostupné na: https://doi.org/10.37188/OPE.20223006.0702. HOU, Y.S. Design and Realization of Ferroelectric Thin Film Physical Parameters Test System Based on Electronic Information Technology. In INTEGRATED FERROELECTRICS. ISSN 1058-4587, OCT 13 2022, vol. 229, no. 1, p. 229-247. Dostupné na: https://doi.org/10.1080/10584587.2022.2074234. LI, Z. Application of Gel Method Ba2TiSi2O8 Ferroelectric Thin Film in Contemporary Handicraft Three-Dimensional Fiber Art Works. In ADVANCES IN MATERIALS SCIENCE AND ENGINEERING. ISSN 1687-8434, SEP 9 2022, vol. 2022. Dostupné na: https://doi.org/10.1155/2022/5997536. MASTELLONE, M. - PACE, M.L. - CURCIO, M. - CAGGIANO, N. - DE BONIS, A. - TEGHIL, R. - DOLCE, P. - MOLLICA, D. - ORLANDO, S. - SANTAGATA, A. - SERPENTE, V. - BELLUCCI, A. - GIROLAMI, M. - POLINI, R. - TRUCCHI, D.M. LIPSS Applied to Wide Bandgap Semiconductors and Dielectrics: Assessment and Future Perspectives. In MATERIALS. FEB 2022, vol. 15, no. 4. Dostupné na: https://doi.org/10.3390/ma15041378. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2016 Registrované v WOS Registrované v SCOPUS Registrované v CCC DOI 10.1007/s00542-016-2887-2 
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Názov súboru Prístup Veľkosť Stiahnuté Typ Licence Manufacturing of membranes by laser ablation in SiC, sapphire, glass.pdf Prístupný 1.8 MB 0 Vydavateľská verzia rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2016 2015 0.974 Q3 0.386 Q2
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