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Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate
Názov Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 MHz repetition rate Autor Sobierajski Ryszard Spoluautori Jacyna Iwanna Dlužewski Piotr Klepka Marcin T. Klinger Dorota Pelka Jerzy B. Burian Tomáš Hájková V. Juha Libor Saksl Karel 1974 SAVMATVY - Ústav materiálového výskumu SAV SCOPUS ORCID Vozda Vojtěch Makhotkin Igor Louis Eric Faatz Bart Tiedtke Kai Toleikis Sven Enkisch Hartmut Hermann M. Strobel Sebastian Loch Rolf A. Chalupský Jaromír Zdroj.dok. Optics Express. Vol. 24, no. 14 (2016), p. 15468-15477 Jazyk dok. eng - angličtina Krajina US - Spojené štáty Druh dok. rozpis článkov z periodík (rbx) Ohlasy KRZYWINSKI, Jacek - CONLEY, Raymond - MOELLER, Stefan - GWALT, Grzegorz - SIEWERT, Frank - WABERSKI, Christoph - ZESCHKE, Thomas - COCCO, Daniele. Damage thresholds for blaze diffraction gratings and grazing incidence optics at an X-ray free-electron laser. In JOURNAL OF SYNCHROTRON RADIATION. ISSN 1600-5775, 2018, vol. 25, no., pp. 85-90. ROSSBACH, Joerg - SCHNEIDER, Jochen R. - WURTH, Wilfried. 10 years of pioneering X-ray science at the Free-Electron Laser FLASH at DESY. In PHYSICS REPORTS-REVIEW SECTION OF PHYSICS LETTERS. ISSN 0370-1573, 2019, vol. 808, no., pp. 1-74. SAKAUE, Kazuyuki - MOTOYAMA, Hiroto - HAYASHI, Ryosuke - IWASAKI, Atsushi - MIMURA, Hidekazu - YAMANOUCHI, Kaoru - SHIBUYA, Tatsunori - ISHINO, Masahiko - DINH, Thanh-Hung - OGAWA, Hiroshi - HIGASHIGUCHI, Takeshi - NISHIKINO, Masaharu - KURODA, Ryunosuke. Surface processing of PMMA and metal nano-particle resist by sub-micrometer focusing of coherent extreme ultraviolet high-order harmonics pulses. In OPTICS LETTERS. ISSN 0146-9592, 2020, vol. 45, no. 10, pp. 2926-2929. CHEN, Tong - WANG, Wenjun - TAO, Tao - ZHANG, Yilin - MEI, Xuesong. Weakening heat accumulation behavior caused by femtosecond pulses for high-performance antireflection micro-nano porous structures. In INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER. ISSN 0017-9310, 2021, vol. 164, no., pp. KONONENKO, Taras - SOVYK, Dmitry N. - KONONENKO, Vitaly V. - KONOV, Vitaly. Optimization strategy for high-quality laser milling of silicon. In OPTICS AND LASER TECHNOLOGY, 2022, vol. 150, no., pp. ISSN 0030-3992. Dostupné na: https://doi.org/10.1016/j.optlastec.2022.107921. JIA, Z.C. - SUN, L.H. - CHEN, X. - LI, X.H. - LI, Z.W. - HAO, L.Y. Thermal process of a silicon wafer under a CW laser and 100-10000 Hz pulsed laser irradiation. In APPLIED OPTICS. ISSN 1559-128X, DEC 20 2023, vol. 62, no. 36, p. 9577-9582. Dostupné na: https://doi.org/10.1364/AO.501947. KLEIN, Y. - TRIPATHI, A.K. - STRIZHEVSKY, E. - CAPOTONDI, F. - DE ANGELIS, D. - GIANNESSI, L. - PANCALDI, M. - PEDERSOLI, E. - PRINCE, K.C. - SEFI, O. - KIM, Y.Y. - VARTANYANTS, I.A. - SHWARTZ, S. High-spectral-resolution absorption measurements with free-electron lasers using ghost spectroscopy. In PHYSICAL REVIEW A. ISSN 2469-9926, MAY 5 2023, vol. 107, no. 5. Dostupné na: https://doi.org/10.1103/PhysRevA.107.053503. CAO, J.Y. - LI, S.H. - TONG, Y.J. - TANG, M. - LI, W.B. - HUANG, Q.S. - JIANG, H.D. - WANG, Z.S. Damage resistance of B4C reflective mirror irradiated by X-ray free-electron laser. In CHINESE OPTICS LETTERS. ISSN 1671-7694, FEB 10 2023, vol. 21, no. 2. Dostupné na: https://doi.org/10.3788/COL202321.023401. Kategória ADCA - Vedecké práce v zahraničných karentovaných časopisoch impaktovaných Kategória (od 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Typ výstupu článok Rok vykazovania 2016 Registrované v WOS Registrované v SCOPUS Registrované v CCC DOI 10.1364/OE.24.015468 
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File name Access Size Downloaded Type License Role of heat accumulation in the multi-shot damage.pdf available 3 MB 2 Publisher's version rok CC IF IF Q (best) JCR Av Jour IF Perc SJR SJR Q (best) CiteScore A rok vydania rok metriky IF IF Q (best) SJR SJR Q (best) 2016 2015 3.148 Q1 1.910 Q1
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