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Title Standard AZ 5214E photoresist in laser interference and EBDW lithographies Author Škriniarová Jaroslava Co-authors Andok Robert 1973- SAVINFO - Ústav informatiky SAV Pudiš D. Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Šušlík Ľ. Source document Vacuum. Vol. 111 (2015), p. 5-8 Category ADCA - Scientific papers in foreign journals registered in Current Contents Connect with IF (impacted) Category of document (from 2022) V3 - Vedecký výstup publikačnej činnosti z časopisu Type of document článok Year 2014 DOI 10.1016/j.vacuum.2014.09.012 URL URL link File name Access Size Downloaded Type License Standard AZ 5214E photoresist in laser interference and EBDW lithographies.pdf available 1 MB 0 Publisher's version