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Title Electron beam lithography method for high-resolution nanofabrication Author Kostič Ivan 1955- SAVINFO - Ústav informatiky SAV Co-authors Vutova Katia Benčurová Anna 1966- SAVINFO - Ústav informatiky SAV Nemec Pavol 1975- SAVINFO - Ústav informatiky SAV Koleva Elena Action International scientific conference High technologies. business. society. HTBS 2017 : 13.-16.3.2017 : Borovets, Bulgaria Source document International scientific conference High technologies. business. Society : Proceedings, Volume I "High technologies". Vol. I, no. 1 (2017), p. 9-12. - Sofia, Bulgaria : Scientific Technical Union of Mechanical Engineering Industry 4.0 Category AFC - Published papers from foreign scientific conferences Year 2017 URL URL link File name Access Size Downloaded Type License Electron beam lithography method for high-resolution nanofabrication.pdf Neprístupný/archív 415.1 KB 1 Publisher's version 
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