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Title Process engineering analysis in semiconductor device fabrication Author info Stanley Middleman, Arthur K. Hochberg Author Middleman Stanley
Co-authors Hochberg Arthur K.
Issue data New York : McGraw-Hill Book Company , 1993. - xvii, 774 s. Issue [1st ed.] ISBN 0-07-041853-5 Keywords mikroelektronika výroba silikónu priemyslové technológie Language English Country United States of America systematics 621.38=111 621.3.049.77=111 Catal.org. BB301 - Univerzitná knižnica Univerzity Mateja Bela v Banskej Bystrici Database xkni - BOOKS Copy count 1, currently available 0, at library only 1 
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Call number Location Sublocation Umiestnenie Info 223219 Univerzita Mateja Bela Department of technology In-Library Use Only